patent/EP-0657925-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0657925-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_040ec81c891acc3f3186f56cb99cf161
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76819 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105
filingDate	1994-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5a7e3da75cc4ae45713c9437bf99e5a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ffd93126eb5d74fb2193812206a3bb5
publicationDate	1995-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	EP-0657925-A1
titleOfInvention	Enhanced planarization technique for an integrated circuit
abstract	A method for planarizing integrated circuit topographies, wherein, after a first layer (1) of spin-on glass is deposited, a layer of low-temperature oxide (3) is deposited before a second layer of spin-on glass (2).
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11201122-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9912663-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5770469-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9724755-A1
priorityDate	1993-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4102422-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6517 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419555680 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261

Total number of triples: 35.