| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eacd252a35e563ff741cb2006460bb80 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-69 |
| filingDate |
1994-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad8832322d1aeba129b5ed06b7c0fb1a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4d01d48c4f34427ec8ee247e82971f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fed2eee1a287d8d1981fb25f9e8b13a4 |
| publicationDate |
1994-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0631188-A1 |
| titleOfInvention |
Resist materials |
| abstract |
Photoacid generators advantageous for use in applications such as photoacid generators used in chemically amplified resists are disclosed. These compounds are based on an ortho nitro benzyl configuration employing an α substituent having high bulk, steric characteristics, and electron withdrawing ability. The enhanced efficacy is particularly found in compounds both having a suitable α substituent and a second ortho substituent with large electron withdrawing and steric effects. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8268531-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7482107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7026093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE38980-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7326511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6037107-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011008732-A1 |
| priorityDate |
1993-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |