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filingDate 1993-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e5e7b2f19b10b6c1437878299004ade
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publicationDate 1994-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0585936-A2
titleOfInvention Metal selective removal process
abstract A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication. n The process is a vapor-phase process anhydrous HF and N 2 H x , and removes non-water water soluble polymers.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6849153-B2
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