| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3348 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
1991-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abec304e568e417919fad804142c7d85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_875b1f258d8c53cc71afe0ece17ef5a0 |
| publicationDate |
1997-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0488393-B1 |
| titleOfInvention |
Method for treating substrates |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7552736-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1990103-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7967996-B2 |
| priorityDate |
1990-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |