| abstract |
This invention relates to a method of hydrolyzing hydridosilanes of the formula HSi(OR)3 to form a soluble resinous hydrolysate comprising a polymer having units of the formula HSi(OH)x(OR)yOz/2, wherein each R is independently an organic group which, when bonded to the silicon through an oxygen atom, forms a hydrolyzable substituent, x = 0-2, y = 0-2, z = 1-3, x + y + z = 3 and the average value of y over all of the units of the polymer is greater than 0. The invention also relates to the soluble hydrolysates formed thereby as well as the method of using said hydrolysates to provide coatings on various substrates, including electronic devices, to form protective layers or inter-level dielectric layers in multilayered devices. |