| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
1990-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15921f3d1cb0f627955d8fc05e682028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b80cf308415bdeda664bd0fa2d02e18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b8d50fff6826f2fbadc5d0e0eb5f824
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9430173234e223697c182e7b1037b3a |
| publicationDate |
1990-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0378156-A2 |
| titleOfInvention |
Positively photosensitive polyimide composition |
| abstract |
A positively photosensitive polyimide composition is disclosed, which composition comprises polyimide having a repeating unit represented by formula (I):n n wherein Ar¹ represents a tetravalent aromatic hydrocarbon group; Ar² represents a divalent aromatic hydrocarbon group having an acyloxy group at the ortho-position and/or the meta-position of the aromatic ring; Ar³ represents a divalent aromatic hydrocarbon group; and the subunit having an amount ratio of m in the repeating unit is present in an amount of at least 20% by weight based on the polyimide. The composition exhibits high photosensitivity in reproduction of a fine pattern and excellent dimensional stability. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0502400-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10145463-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5851736-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10145463-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10145469-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6866980-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1089129-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5288588-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0424940-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10145469-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7070904-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2275475-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2275475-A |
| priorityDate |
1989-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |