| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eacd252a35e563ff741cb2006460bb80 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3011 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-27 |
| filingDate |
1989-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1995-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e217c15a481ce8983c00f00c6cb8e5c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_203f6f5fbc214569e8c5e7573a76217f |
| publicationDate |
1995-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0352940-B1 |
| titleOfInvention |
Method of measuring specific contact resistivity of self-aligned contacts in integrated circuits |
| priorityDate |
1988-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |