http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0317794-A3
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 1988-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1989-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0317794-A3 |
| titleOfInvention | Chlorofluorocarbon additives for enhancing etch rates in fluorinated halocarbon/oxidant plasmas |
| priorityDate | 1987-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.