| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_040ec81c891acc3f3186f56cb99cf161 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28176
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2644 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-58 |
| filingDate |
1988-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e15c9ab4527f1264e820953b83d0a8ff |
| publicationDate |
1988-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0294259-A2 |
| titleOfInvention |
Screening of gate oxides on semiconductors |
| abstract |
Testing of the gate oxides (14A) of all the transistors of a single die in a silicon wafer to be diced into a plurality of dice in a single operation is effected at an intermediate stage of the fabrication process by providing a metal layer (20) contacting selectively each of the gate electrodes (16) of a die at an intermediate stage of the processing and providing between the layer (20) and the wafer a voltage (22) of amplitude (V s ) insufficient to cause significant tunneling current through good gate oxides but sufficient to cause significant tunneling current through defective gate oxides. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5850149-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03034482-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03034482-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19653177-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19653177-A1 |
| priorityDate |
1987-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |