| abstract |
The invention relates to copolymers with o-nitrocarbinol ester groups and their use.n n n The copolymers according to the invention contain 5 to 50 mol.% Of monomers with o-nitrocarbin ester groups, 95 to 50 mol.% Of O-substituted p-hydroxystyrene, and 0 to 30 mol.% Of other copolymerizable monomers.n n n They are suitable as photoresists. |