Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8e6a13e4ae501eb40decf5732cf09c6 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07J51-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-1804 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07J51-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-08 |
filingDate |
1984-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_babc33beef221e415232447b04cc5d62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76911d37aad6541a3ac8da7d8c79afea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10b75fd1e0575f00a8aac8fb5dae3a03 |
publicationDate |
1984-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-3415791-A1 |
titleOfInvention |
METHOD FOR PRODUCING SEMICONDUCTOR COMPONENTS |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0271010-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0271010-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0276709-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0276709-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0277555-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0277555-A3 |
priorityDate |
1983-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |