| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
1987-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e4512bd0a0eeb0e0c32222956af04bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8fd8587a731713904fbdfa164da85dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1626e3f405bf601650d6fff4713e7583 |
| publicationDate |
1988-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0258698-A2 |
| titleOfInvention |
Dry etching method |
| abstract |
Etching of an article is carried out by maintaining the article at a temperature at which the vapor pressure of etching gas molecules becomes equal to or higher than the pressure of etching gas and the vapor pressure of neutral radicals contained in a plasma becomes equal to or lower than the pressure of an etching gas. An etching pattern with a substantially vertical side profile and extremely small in dimensional shift from the mask can be formed at high precision. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0297898-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0406669-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0406669-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0301335-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5002631-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0353719-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0353719-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0289131-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0301335-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0297898-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4986877-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0445981-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0445981-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0498209-B1 |
| priorityDate |
1986-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |