http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0243556-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E30-30 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21C11-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34 |
| filingDate | 1986-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1993-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1993-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-0243556-B1 |
| titleOfInvention | Cathode/ground shield arrangement in a target for a sputter coating apparatus |
| priorityDate | 1986-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.