http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0173583-A1

Outgoing Links

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e68936d3fb435785c9dcd044cfe3b5d4
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-517
filingDate 1985-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1cbdd708efacce7607e85024e785b5b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7373e8fb0e365a6daaf28a50ad0372ce
publicationDate 1986-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0173583-A1
titleOfInvention Discharge apparatus
abstract A discharge reaction apparatus utilizing a dynamic magnetic field for subjecting the surface of an object to a depositing or etching process is disclosed. The apparatus comprises means (104, 105, 106) for generating a dynamic magnetic field along the surface of an electrode (101) and means to limit or stop any circulating motion of electrons around the electrode.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0478174-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0272143-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0478174-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0272142-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0243556-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0228865-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0228865-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0173583-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6773544-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5874362-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0566220-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0566220-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6503367-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6020270-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0565212-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6863835-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6402885-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0339580-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0339580-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0565212-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0272143-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0272142-A2
priorityDate 1984-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

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isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129741161
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Total number of triples: 43.