| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-095 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0055 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-42 |
| filingDate |
1987-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d90f1d355d997a6494265af1e3c119aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0409489f4c5cd16d532d5a7ba732f9cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0427f69935afdf10fd710a4ffba6303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fc12173caf12ded90240ea18314ae16 |
| publicationDate |
1987-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0241718-A2 |
| titleOfInvention |
Process for removing contaminant from holes |
| abstract |
Contaminant is removed from holes by etching in a gaseous plasma by first removing contaminant from the vicinity of the edges of the hole. Next, a mask is provided in the vicinity of the edges to prevent etching by contacting with a gaseous plasma which is different from the gaseous plasma employed in the first etching step. The holes are then etched in a gaseous plasma to remove contaminant from the interior of the holes in the vicinity of the center of the holes, whereby the mask protects the edges from being etched. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5487810-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0308854-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5552226-A |
| priorityDate |
1986-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |