http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0225328-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec85755992a208999ac3ba3945461e8c |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D17-0208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D17-0214 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D17-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate | 1986-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_883b401db1964c123233899a99af45b8 |
publicationDate | 1987-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | EP-0225328-A1 |
titleOfInvention | Apparatus and methods for effecting a burn-in procedure on semiconductor devices |
abstract | Semiconductor devices (47) are mounted on cards (46) and installed on elevated racks (44) projecting from a tank (38) forming an accelerated aging chamber. The racks are individually lowered to immerse the operating devices in a liquid medium (42) at a high temperature. The racks are individually accessible via aligned segments (34A-34E) with a segmented cover to reduce the penetration of ambient water vapor. The temperature of the medium is maintained by passing it through cooling coils (112). A combination of threaded rods (156) and levers (150) allows variable speed pumping, in order to take account of variations in viscosity of the medium, from a fixed speed motor (134). Pumping also ensures a uniform temperature of the medium. The vapors given off in the chamber are injected through an acid-absorbing material (226) to remove hydrofluoric acid and then through the coils of a condenser (202). The condensed water is separated from the condensed medium in a separator (70) which has deep tanks and a circuit (286) to indicate the water level. The liquid medium is recycled to the accelerated aging chamber. A filter (62) cleans the liquid medium. |
priorityDate | 1985-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.