| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-04 |
| filingDate |
1984-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce24c667085f4d6698742eed397932bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_433e2a3210bd957b96e7400c2df05fc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bbe6844ac89cc3e933615bd93e857bf |
| publicationDate |
1985-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0149779-A2 |
| titleOfInvention |
Laser induced chemical etching of metals with excimer lasers |
| abstract |
Disclosed is a method of etching a metallized substrate by excimer laser radiation. The substrate is exposed to a selected gas, e.g., a halogen gas, which spontaneously reacts with the metal forming a solid reaction product layer on the metal by a partial consumption of the metal. A beam of radiation from an excimer laser, e.g. XeF laser operating at a wavelength of 351 nm or XeCl laser at 308 nm or KrF laser at 248 nm or KrCi laser at 222 nm or ArF laser at 193 nm or F<sub>2</sub> laser at 157 nm, is applied to the reaction product in a desired pattern to vaporize the reaction product and thereby selectively etch the metal with a high resolution. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0265872-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109374596-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0265764-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0219697-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0219697-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0265872-A2 |
| priorityDate |
1984-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |