http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0140201-A2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3763aa0cdd9f34607453119c627586a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-906
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
filingDate 1984-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae3c91be95df36719bcc04b7a0571406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a92ac9ef79dc56d99a9bb5f3e1d62667
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_703f1ff5c40f5089f0529f296f073a19
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3032e79d85280e17a77ce0d00e4ab92a
publicationDate 1985-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0140201-A2
titleOfInvention Dry-etching process
abstract A dry-etching process comprising dry-etching treatment of semiconductor material by action of a gas and, if necessary, cleaning treatment, characterized in that at least one of the dry-etching and cleaning treatments is conducted under action of a gas composed essentially of a fluorinated ether.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0198507-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6329298-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0416774-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5302236-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0482519-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5556714-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2588120-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0198507-A3
priorityDate 1983-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11641
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127482296
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17358
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419486198
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419509138
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5558
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129120217
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128071048
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129506588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517688
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6594
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128104636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547105
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6374
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6373
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521555
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24556
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129420544
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419516085
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129264647
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127494169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25135
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2737095
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414859156
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129327014
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127579363
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136491
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6382
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523907
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523852
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127739328
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128886153
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517548
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6393
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547101
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6588
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129094243
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129735795
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12418
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6333
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID25134
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547108
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6591
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544585
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6431
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517628
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6575
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6392
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545752
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517214
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6383
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129396299
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7839
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129602314
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523397
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546505
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415712843
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24637
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128309135
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6432
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546198
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129090196
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128821702
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6340
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6278
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523446
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129080865
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527253
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394982
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128120202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521456
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419517504
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556964
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6337
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546728
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416162256
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394983
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24553
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515651
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11205
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129112787
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128193197
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129136742
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129714382
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530548
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127401213

Total number of triples: 127.