| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e9ec95f75bc5dcc8f2c6f36fd3ee1ca6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-6402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
1982-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fd3e88acd6d264491888c53ef33fa42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ade54141ef3cc66c603e0d74da838ec2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9042b8da7a4b369145f0d4c400863ee2 |
| publicationDate |
1983-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0070523-A2 |
| titleOfInvention |
Device fabrication using gas-solid processes |
| abstract |
This invention concerns with fabricating devices using gas phase processes such as gas etching and chemical vapor deposition. The gas-phase processes may be accurately monitored and adjusted via an induced fluorescence. The gaseous phase used in the process to be monitored is probed by excitation with a suitable energy source. The emission from the gas phase induced through this excitation is then monitored and yields an accurate measure of concentration of the active species present. In turn the conditions of the fabrication process are adjusted based on these discerned concentrations. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0256216-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2545622-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0256216-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2343728-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2582149-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0081785-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0416787-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0081785-A2 |
| priorityDate |
1981-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |