http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0062733-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3af3390937c06df72b00e23a42cf63ef
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
filingDate 1982-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c9dbbd1d195e5d58d74d24e6b7c105c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02e125e1dc67f5a8a5a56c062c0ddfb6
publicationDate 1982-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0062733-A1
titleOfInvention Metal ion-free photoresist developer composition
abstract An aqueous metal ion-free developer composition for developing photoresists comprising a metal ion-free alkali and a metal ion-free surfactant that is quaternary ammonium compound. The developer permits a reduction of from 40-50% in the energy necessary to expose the photoresist without deleterious effect on image quality and image resolution.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4556629-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4606999-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0267437-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0267437-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0177905-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4610953-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0177905-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0147074-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0127171-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2226150-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4806453-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5756267-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4741989-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9523999-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0089249-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0124297-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4710449-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0124297-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0186184-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0186184-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4530895-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4914006-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0147074-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0244567-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0089249-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4729941-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0244567-A3
priorityDate 1981-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579030
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID172281
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419483452
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID428
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID312
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452697243
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID961
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID753
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID60966
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID71310495
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559020
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457444288
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513606
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559517
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID104812
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9855439
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447644831
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453615033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559568
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393349
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410442037
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974

Total number of triples: 72.