| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-1136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-107 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-105 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48 |
| filingDate |
1987-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_890b27707b9e977e91ec0dfbdac2dd65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a442c87c2bb8467abde27762b5b6cf8e |
| publicationDate |
1988-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3708235-A1 |
| titleOfInvention |
METHOD FOR THE PRODUCTION OF CONDUCTOR PATHS ON SUBSTRATE MATERIAL CONTAINING ALUMINUM NITRIDE A1 N |
| abstract |
In a method of fabricating conductor tracks on substrate material composed of aluminium nitride, AlN for IC supports, the object is to introduce the conductor tracks in a more precise and more elegant way than with the conventional evaporation or "sputtering" methods. The substrate (5) which is in the form of strips, plates or the like, is irradiated in accordance with the specified conductor track pattern (7) with an electromagnetic radiation (2, 2.3) having an energy density and an exposure time per unit area which are such that the AlN decomposes into metallic aluminium with the release of nitrogen in the irradiated zones (70). In particular, sintered AlN is used and the partial conversion is brought about by means of laser radiation. Conductor track fabrication. <IMAGE> |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1845170-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4401612-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006017630-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1845170-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007115546-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007115546-A2 |
| priorityDate |
1987-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |