| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e9ec95f75bc5dcc8f2c6f36fd3ee1ca6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1977-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72cf6a560bc4fbac20a715b2d1937d38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a68ec6f24aafd358221e943832c1085 |
| publicationDate |
1978-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2735377-A1 |
| titleOfInvention |
PROCESS FOR MANUFACTURING MODIFIED SUBSTRATES AND INTERMEDIATE PRODUCTS OF THIS PROCESS |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3109728-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3109809-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0005551-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0005551-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3201815-A1 |
| priorityDate |
1976-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |