Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0057 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
filingDate |
1973-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1985-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
1985-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-2341216-C2 |
titleOfInvention |
Process for the complete removal of a carbonaceous material from the surface of a support |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5417826-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4202158-C1 |
priorityDate |
1972-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |