| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-114
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 |
| filingDate |
1968-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a2796e9daf5ad1aecd9a4dbada6469f |
| publicationDate |
1971-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-1696488-A1 |
| titleOfInvention |
Process for etching a difficultly soluble layer |
| priorityDate |
1967-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |