http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102021103353-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-486 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2933-0058 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-58 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-48 |
| filingDate | 2021-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52a4b2099ea811b6444f7017aaeac2d6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d00fa6ce4fd363e3b0d06b31b886ca49 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28d0a53e46c363d6d46ae44020df6719 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de7026b0c23714802601e76858aeed35 |
| publicationDate | 2022-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102021103353-A1 |
| titleOfInvention | Method for producing a cap substrate, cap substrate and optical component |
| abstract | The application relates to a method for producing a structured cover substrate (1, 1') for an optical component (2, 2', 2"), comprising the steps of: providing a substrate layer (3), producing a large number of layers on an underside (4 ) depressions (5) arranged in the substrate layer (3), applying an optically transparent thin layer (13) to the underside (4) of the substrate layer (3) and exposing a part of the optically transparent thin layer (13) in a region (16) of each of the depressions (5), so that the part of the optically transparent thin layer (13) that is freed in each case forms an optical membrane window (15), wherein the freeing involves etching of parts of the substrate layer (3) starting from an upper side (4) opposite the underside (4). 11) of the substrate layer (3). The application also relates to a structured cover substrate (1, 1') and an optical component (2, 2', 2"). |
| priorityDate | 2021-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.