http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102018208684-B4

Outgoing Links

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filingDate 2018-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f8cc16d7e49b40ff65fcda87a8433ed
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publicationDate 2022-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-102018208684-B4
titleOfInvention MONOLITHICALLY DESIGNED SPECTRAL APPARATUS
abstract Spectral apparatus (10) with a first aperture limiting device (11), a second aperture limiting device (12), a first mirror (14), a movable MEMS mirror (15) and a dispersive element (18) spatially separated from the MEMS mirror (15), the movable MEMS mirror (15) is movable relative to the dispersive element (18), wherein the first mirror (14) is designed to influence the electromagnetic radiation (13) incident through the first aperture limiting device (11) in a beam-shaping manner and to guide the influenced radiation to the movable MEMS mirror (15), wherein the movable MEMS mirror (15) is designed to reflect the influenced radiation to the dispersive element (18), wherein the dispersive element (18) is configured to split the influenced radiation spectrally and to reflect it back to the movable MEMS mirror (15) in a limited wavelength range, and wherein the movable MEMS mirror (15) is further configured to reflecting spectrally split radiation with the restricted wavelength range to the first mirror (14) or to a second mirror (19) and from there to the second aperture limiting device (12), wherein the movable MEMS mirror (15) with at least one of the first aperture limiting device (11), the second aperture limiting device (12) and the dispersive element (18) is designed monolithically as a common component, and wherein the first and the second aperture limiting device ( 11, 12) are arranged spatially separated from the movable MEMS mirror (15) and have a lateral offset (D 1 , D 2 ) to an axis of rotation (21) of the movable MEMS mirror (15).
priorityDate 2018-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Incoming Links

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Total number of triples: 30.