abstract |
An optical device comprises a first substrate having an optical functional element and a second substrate having a movable micromechanical functional element, wherein the first substrate and the second substrate are connected in a stacked manner, so that a beam path is present, which is between the folded first substrate and the second substrate, wherein the movable micromechanical functional element and the optical functional element are arranged in the beam path. Furthermore, a method for producing an optical device comprises producing a first substrate having an optical functional element, and producing a second substrate having a movable micromechanical functional element, and connecting the first substrate and the second substrate such that a Beam path is present, which is folded between the first substrate and the second substrate, wherein the movable micromechanical functional element and the optical functional element are arranged in the beam path. |