| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00317 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-08 |
| filingDate |
2017-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2aa314c34a8c1a26484c322dfc3c9ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de7026b0c23714802601e76858aeed35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52a4b2099ea811b6444f7017aaeac2d6 |
| publicationDate |
2019-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-102017213070-A1 |
| titleOfInvention |
Method of fabricating a MEMS mirror assembly and MEMS mirror assembly |
| abstract |
A MEMS mirror arrangement is proposed for detecting a large angle range up to 180 °, preferably up to 160 °, and a method for producing a MEMS mirror arrangement. The mirror arrangement comprises a carrier substrate (1) on which a mirror (2) oscillating about at least one axis is suspended, a transparent lid (4) which is hermetically sealed to the carrier substrate (1) and which has a hemispherical dome (6). and a compensation optics (8) arranged in a predetermined beam path for an incident beam outside the dome (6), the center of the mirror (2) being at the center of the dome, and the compensation optics (8) being the incident Beam collimated in such a way that caused by the interfaces of the dome divergence or convergence of the beam after exiting the dome (6) is substantially compensated. The MEMS mirror arrays are formed by joining a lid wafer and a mirror wafer, each having a plurality of hemispherical domes and mirrors suspended from the carrier substrate, and then separating the mirror arrays from the assembled wafers. The domes of the lid wafer are made by glass flow. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020116511-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020008076-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020008076-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021259936-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020116511-A1 |
| priorityDate |
2017-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |