http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102007045734-B3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69a4ae662cd6a46490ee45a70e85dc39 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823437 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2007-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_511fc280dd28a3e5a0fef97b8ad0259c |
| publicationDate | 2008-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102007045734-B3 |
| titleOfInvention | Method of manufacturing an integrated circuit and integrated circuit made therewith |
| abstract | A method of fabricating an integrated circuit comprising patterning an insulating material (100) and a semiconductive material (110), wherein the insulating material (100) and the semiconductive material (110) are adjacent, comprising the steps of:. Partial removal of the semiconductive material (110); , Surface treating the partially removed semiconductive material (110); , partially removing the insulating material (100), wherein the partial removal of the semiconductive material (110), the surface treatment of the semiconductive material (110) and the partial removal of the insulating material (100) is performed in at most one process chamber and wherein the process chamber Contains means for generating a plasma. |
| priorityDate | 2007-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.