http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102006051766-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69a4ae662cd6a46490ee45a70e85dc39 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 2006-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7a2b0317f7ea3937fd286047f06b7e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9588e156fa786257015e57bdd4990848 |
| publicationDate | 2008-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-102006051766-A1 |
| titleOfInvention | Process for structuring a photoresist |
| abstract | ThenThe present invention relates to a method of forming anstructured photoresist layer (21, 22) on a substrate (20).nIn this case, a substrate (20) is used, a photoresist layern(21, 22) applied to the substrate (20) and the photoresist layern(21, 22) selectively exposed, wherein a first acid (41) in an exposednArea (23) of the photoresist layer (21, 22) is formed. Byna first baking of the photoresist layer (21, 22) are acid catalyzedncaused chemical reactions, by which a solubility of thenexposed area (23) of the photoresist layer (21, 22)nbecomes. A second acidn(42) becomes selective in the exposed area (23) of the photoresist layern(21, 22) diffused. By a second baking of the photoresist layern(21, 22) are acid-catalyzedncause chemical reactions through which the solubilitynthe exposed area (23) of the photoresist layer (21, 22) onnbeing affected. For structuring, the photoresist layer (21,n22) developed with the help of a developer. |
| priorityDate | 2006-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.