http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113478382-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f41f4c7e964ab48bddd73056dffc0399 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-205 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-20 |
| filingDate | 2021-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6daaf290892f802b4f37abd647bfdda5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a589c4fd3c40db85aac735ad516e11dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68bf5bfc067935647ab09f04975ad251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0eaa93f06a08ea628170fdd3c194031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d5200341d2e527229645395f2c16def http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b115353c956ac8edefc0eb14599bd420 |
| publicationDate | 2021-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-113478382-A |
| titleOfInvention | Inspection windows, chemical mechanical polishing pads and polishing systems |
| abstract | The invention discloses a detection window, a chemical mechanical polishing pad and a polishing system related to the technical field of chemical mechanical polishing. The detection window of the present invention is arranged in the polishing layer, and includes a light-transmitting portion and a reinforcing portion. The lower surface of the light-transmitting portion is provided with a concave area, the reinforcing portion is located in the concave area, and the reinforcing portion and the light-transmitting portion are integrally formed or bonded together. A hollowed-out part is arranged in the part, 0<the cross-sectional area of the hollowed-out part≤80% of the cross-sectional area of the concave region; further, the hollowed-out part in the middle of the reinforcing part and/or the hollowed-out edge is preferably a reinforcing part that is hollowed out in the middle of the reinforcing part and not connected to each other. Center cutout and edge cutout. The detection window provided by the invention has improved window strength and reduced compression ratio, which can effectively reduce wafer scratches and improve the service life of the polishing pad. |
| priorityDate | 2021-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.