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filingDate 2019-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2021-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-113242890-A
titleOfInvention Chemical Mechanical Polishing of Substrates Containing Copper and Ruthenium
abstract The present invention relates to a chemical mechanical polishing (CMP) composition and a chemical mechanical polishing (CMP) method. In particular, the present invention relates to a composition and method for chemical mechanical polishing of a substrate containing copper and ruthenium, in particular a semiconductor substrate containing copper and ruthenium.
priorityDate 2018-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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