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publicationDate 2021-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-112750774-A
titleOfInvention Semiconductor device manufacturing method
abstract Embodiments of the present disclosure provide a semiconductor device and a method for fabricating the same, which utilize a passivation dopant to passivate a gate dielectric layer. The passivation dopant is introduced through the work function layer into the gate dielectric layer using a process such as immersion. Passivating dopants are atoms that help passivate electrical trapping defects, such as fluorine.
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