http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112458434-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448 |
| filingDate | 2021-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-112458434-B |
| titleOfInvention | Packaging container for solid precursor and application of packaging container in vapor deposition process |
| abstract | A packaging container for solid precursors and its application in vapor deposition process. The packaging container includes: the bottle comprises a large bottle body, a bottle cap and at least two small bottle bodies, wherein the large bottle body and the small bottle bodies are sealed through the bottle cap, and the small bottle bodies are positioned in a cavity of the large bottle body; the bottle cap is provided with an air inlet pipe and an air outlet pipe, and the pipe orifice of the air inlet pipe is communicated with the cavity of the large bottle body; one side of the small bottle body is provided with an air guide hole, the cavity of the small bottle body with the smallest volume is communicated with the pipe opening of the air outlet pipe, and the air guide holes between the adjacent small bottle bodies are arranged away from each other. Because the gas guide hole is arranged on one side surface of the small bottle body, the path of the carrier gas passing through the inside of the packaging container is not limited by the depth of the packaging container, the packaging container can effectively utilize the transverse sizes of the cavities of the large bottle body and the small bottle body, the contact distance and time of the carrier gas and the solid precursor can be obviously increased, the vapor pressure of the precursor in the gas outlet pipe is stable, and continuous and stable precursor output can be provided. |
| priorityDate | 2021-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.