http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111856231-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2601 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B1-002 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 |
| filingDate | 2020-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-111856231-B |
| titleOfInvention | Method for analyzing path of moisture entering chip |
| abstract | The invention discloses a method for analyzing a path of moisture entering a chip, which comprises the steps of selecting a wafer of a chip with a failure in humidity reliability test; collecting original test data of the wafer, wherein the original test data comprises original process procedure parameter test data and original wafer level parameter test data; cleaning the wafer subjected to the high-temperature high-humidity test; collecting test data of the cleaned wafer, wherein the test data comprises original process procedure parameter test data and test wafer level parameter test data; and judging a path of moisture entering the chip according to the wafer map of the difference value between the original test data and the test data. The invention can efficiently judge the path of moisture entering the chip by innovatively improving the analysis method of the path of moisture entering the chip, and can provide an effective means for conventional reliability detection for wafer manufacturers. |
| priorityDate | 2020-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 |
Total number of triples: 21.