http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110312776-B
Outgoing Links
Predicate | Object |
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classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
filingDate | 2018-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2021-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2021-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CN-110312776-B |
titleOfInvention | Polishing composition, method for producing the same, and polishing method using the polishing composition |
abstract | [Problem] To provide a polishing composition excellent in the performance of eliminating the swelling of the periphery of the laser hard mark. [Solution] A polishing composition comprising abrasive grains, a water-soluble polymer, a basic compound, and water, wherein the water-soluble polymer comprises a structural unit derived from styrene or a derivative thereof, and a A copolymer of structural units of other monomers. |
priorityDate | 2017-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 89.