| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62c14cf18d1bf5d26688b6e3768ebfeb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0723
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24917 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-70 |
| filingDate |
2017-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e007dc7733010c7cc895a41c2ebc2f7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8bb34f76640196f1fdd3751d1014373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2e04580982a0a3ad9922713dd1d4d8b |
| publicationDate |
2019-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110140203-A |
| titleOfInvention |
High Aspect Ratio Plating Structures and Anisotropic Plating Processes |
| abstract |
Apparatuses including high aspect ratio plated structures and methods of forming high aspect ratio plated structures are described. A method of making a metal structure comprising: providing a substrate having a metal base, the metal base being characterized by a height to width aspect ratio A/B; and electroplating a metal crown on the base to form the metal structure, whereby The height to width aspect ratio A/S of the metal structure is greater than the aspect ratio A/B of the base. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387033-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521785-B2 |
| priorityDate |
2016-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |