| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32e7cfbcd94f0bb4309a7945b0bb8ede |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N31-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-22 |
| filingDate |
2017-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d24708367e5861cd12a49b7c71480a38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cba5ede106f6cd89e384e9c154f2e641
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3b0cdff8c37502b0cfbbc66a02ea1ce |
| publicationDate |
2019-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-110114668-A |
| titleOfInvention |
Pigmented Aluminum Anodized Plasma Indicator |
| abstract |
The subject of the present invention is to avoid contamination from the ink composition in the chamber. As a solution, the present invention provides a dye-containing aluminum anodized plasma indicator in which a dye is contained in pores formed by anodization. |
| priorityDate |
2017-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |