http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110036460-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2205-128 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2205-126 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2017-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d7422e268f9bffa99f0f8ee91bfe94f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d21d1bfae07f7ac67bac91adc7c1f4e5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07cbdf5f3f756988709a8e97a99e4c30 |
| publicationDate | 2019-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-110036460-A |
| titleOfInvention | Dry etchant composition and dry etching method |
| abstract | The invention discloses a dry etchant composition and an invention using the same. The dry etchant composition contains 1,3,3,3-tetrafluoropropene, CH x C y F z (x, y, z is an integer greater than or equal to 1, and x+y+z=4) a hydrochlorofluorocarbon, and the concentration of the above-mentioned hydrochlorofluorocarbon relative to 1,3,3,3-tetrafluoropropene is 3 ppm by volume More than and less than 10000 volume ppm. The purpose of the present invention is to improve the storage stability of HFO-1234ze in the semiconductor manufacturing process without sacrificing the good etching properties of HFO-1234ze, suppress the generation of acidic substances, and prevent storage containers, piping, and etching chambers. corrosion. |
| priorityDate | 2016-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.