http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108701611-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f7f120efe096284c7389702c969cf3d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K15-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2017-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24b686155c13e2e77c008488679089a9 |
| publicationDate | 2018-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-108701611-A |
| titleOfInvention | Dry ecthing composition and the container for having been filled with dry ecthing composition |
| abstract | It is an object of the invention to inhibit the dry ecthing composition for containing fluorination saturated hydrocarbons with high concentration to be fluorinated saturated hydrocarbons in keeping or in use to decompose.The dry ecthing composition of the present invention contains the fluorination saturated hydrocarbons of 99 volume % or more, further contains amine compounds.In addition, dry ecthing is preferably Azeotrope compositions or Azeotrope-like compositions with composition. |
| priorityDate | 2016-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 77.