http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107993913-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 2016-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-107993913-B |
| titleOfInvention | Load cavity and wafer edge-washing device and semi-conductor processing equipment |
| abstract | The embodiment of the present invention provides a kind of loading cavity and wafer edge-washing device and semi-conductor processing equipment.It include wherein cavity, supports loadboard, Buffer Unit and shielding mounted in cavity.Cavity includes upper cover body and lower base, and chamber is collectively formed in conjunction with lower base in upper cover body.The bottom of upper cover body has towards the vertically extending positioning column in the direction of lower base.Supports loadboard is configured in chamber and has loading end, and loading end is to carry workpiece.Positioning column is fixed in Buffer Unit coupling.Buffer Unit has sleeve and elastic component, and one end of sleeve and elastic component are connected to each other, and the other end of sleeve has opening.Sleeve is set on positioning column via opening sleeve.Shield configuration is on the loading end that support carries version. |
| priorityDate | 2016-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451349547 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID42503 |
Total number of triples: 17.