| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ef01e33058cf740cf2197991be97af1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D179-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-0206
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02343
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76865
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| filingDate |
2016-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51c536c831d3ec6631a2907252d4cd3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29aafeb2c7fb5894024fed3c883276e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88f39a900ee164c07ccd777a993771f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f540f94c18684703221a5548da5fb4ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_286afc47b0af846ee9155af7018bf9c8 |
| publicationDate |
2017-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-107431016-A |
| titleOfInvention |
Manufacturing method of buried planarization film and manufacturing method of electronic device |
| abstract |
The present invention is a method for manufacturing an embedding planarization film, which includes the following steps: a first coating step of applying a first coating containing a polyamine and a first solvent to a region including the concave portion of a member having a concave portion; coating liquid and bury the first coating liquid in the above-mentioned concave portion; The 2nd coating liquid which is the 2nd solvent which is 200 degreeC or less and SP value is 30 (MPa) 1/2 or less. |
| priorityDate |
2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |