| abstract |
The invention discloses a perovskite solar cell with a high-quality metal oxide electron transport layer and a preparation method thereof, comprising a glass substrate, a transparent conductive oxide electrode and a metal oxide electron transport layer, a perovskite light absorbing layer, a hole transport layer, and a metal electrode. The transparent conductive oxide electrode is a transparent conductive oxide electrode that has been treated with fluorine-based plasma to achieve fluorine doping. The metal oxide electron The transport layer is a fluorine-doped metal oxide electron transport layer that has been treated with fluorine-based plasma, wherein the fluorine-based plasma is generated by bombarding a fluorine-containing element gas with plasma. The invention has the advantages of simple process, good uniformity, good repeatability and high efficiency of the perovskite solar cell. |