http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106898534-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2015-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106898534-B |
| titleOfInvention | Plasma confinement ring, plasma processing apparatus and processing method for substrate |
| abstract | The invention discloses a kind of plasma confinement ring, plasma processing apparatus and processing methods that corona treatment overall situation uniformity can be improved.Wherein, which includes wall body in a ring, and for constraining plasma in the inner, the wall body includes: inner wall in a ring, is made of conductor or semiconductor material in the wall body circular space；Outer wall in a ring, is formed of an electrically insulating material. |
| priorityDate | 2015-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.