http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106416431-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3211 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2015-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-106416431-B |
| titleOfInvention | Plasma generating device |
| abstract | The present invention provides a kind of plasma generating devices and Helicon wave plasma module.The plasma generating device includes the multiple Helicon wave plasma modules for being configured to generate Helicon wave plasma in external static magnetic field；Be configured to handle the main chamber of single substrate by receiving the plasma that generates in the Helicon wave plasma module.Each Helicon wave plasma module includes that the through-hole that is formed on the top plate for being mounted to be centered around the main chamber is prominent, the external container that is formed by dielectric material and have cylindrical shape；Interval configures and establishes the permanent magnet of magnetostatic field on central axis direction in the inside of the external container on the central axis direction of the external container；It is formed by dielectric material and the external container is spaced a predetermined distance from, configures the inside in the external container and the cup-like inner container including internal container top plate；It is arranged to wind the induction coil of the external container；With formed by conductor, from the external container top plate on the external top surface for receiving processing gas and being mounted on the external container.The internal container top plate includes multiple through-holes and has the gas buffer space formed between the internal container top plate and the bottom surface of the external container top plate, wherein the processing gas gathered in the gas buffer space is provided to the inner space of the internal container via the through-hole of the internal container top plate to generate plasma. |
| priorityDate | 2014-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.