| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0694
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4581 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 |
| filingDate |
2015-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4ccf8de3d565306eaf12e7c65d0dddc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a3cbff347b5ce36e8992af6be3ee2ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_001664635dd539875cc4771557c36408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ca8d884f5b95e6e4ec16fb875e3881e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9da225554df0144657bbe981e528c192 |
| publicationDate |
2016-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CN-106133885-A |
| titleOfInvention |
Plasma Resistant Thin Film Coatings for High Temperature Applications |
| abstract |
An article, such as a susceptor, includes a body of thermally conductive material coated by a first protective layer and a second protective layer over a surface of the body. The first protective layer is thermally conductive ceramic. The second protective layer covers the first protective layer and is a plasma-resistant ceramic film that resists cracking at a temperature of 650°C. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111101128-A |
| priorityDate |
2014-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |