http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105895519-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2016-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105895519-B |
| titleOfInvention | Residue-free system and method for isotropic etching of silicon in tight spaces |
| abstract | The present invention relates to a residue-free system and method for isotropically etching silicon in tight spaces. A system and method for etching a substrate includes disposing a substrate including a first structure and a dummy structure in a processing chamber. The first structure is made of a material selected from the group consisting of silicon dioxide and silicon nitride. The dummy structure is made of silicon. A carrier gas is supplied to the processing chamber. The nitrogen trifluoride and hydrogen molecular gases are supplied to the processing chamber. Plasma is energized in the processing chamber. The dummy structures are etched. |
| priorityDate | 2015-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.