http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105810579-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30655 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2016-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105810579-B |
| titleOfInvention | Etching method |
| abstract | The invention provides an etching method for etching a 1 st region composed of silicon oxide with respect to a 2 nd region composed of silicon nitride while preventing an opening from being closed. The etching method of the present invention includes the following steps: a first step 1 of generating plasma of a processing gas containing a fluorocarbon gas in a processing container containing an object to be processed, thereby forming a deposit containing a fluorocarbon on the object to be processed; a 2 nd step of generating a plasma of a process gas containing an oxygen-containing gas and an inert gas in a process container containing a target object in the 2 nd step; and a 3 rd step of etching the 1 st region with fluorocarbon radicals contained in the deposit in the 3 rd step. In this etching method, a sequence including the 1 st step, the 2 nd step, and the 3 rd step is repeatedly performed. |
| priorityDate | 2015-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.