http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105702572-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3341 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76804 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 2015-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-105702572-B |
| titleOfInvention | Plasma-etching method |
| abstract | The present invention, which provides one kind and is able to suppress front end, to attenuate, and forms the plasma-etching method in the hole of desired opening diameter in silicon nitride.The plasma-etching method includes: the first step of processing gas of the supply including oxygen and fluorocarbon in plasma processing unit；With processing gas is plasmarized, the second step being etched across silicon-nitride layer (106a) of the first exposure mask (106) to handled object, second step is executed in the state of the inner wall for the opening for making the organic film (ad) generated by processing gas be attached to the first exposure mask (106) by the way that the temperature of handled object is slowly declined to second temperature T2 (40 DEG C) from the first temperature T1 (80 DEG C). |
| priorityDate | 2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.