http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104303273-B
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2013-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2017-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2017-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-104303273-B |
| titleOfInvention | Engraving method and plasma processing apparatus |
| abstract | In one embodiment, provide a kind of method for etching the etched layer containing polysilicon.The method includes：A () prepares the operation of processed matrix, this processed matrix has etched layer and the mask being located in this etched layer；B () uses the operation of this mask etching etched layer.Mask has：1st mask portion, it is made up of polysilicon；2nd mask portion, it is made up of silicon oxide, and between the 1st mask portion and described etched layer.In the operation of etching etched layer; supply into the process container being accommodated with processed matrix for the 1st gas etching etched layer, the 2nd gas of the deposit being attached to mask for removing and the 3rd gas for protection the 1st mask portion, generate plasma in process container. |
| priorityDate | 2012-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.